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The CBS is a robust linear stage for all-round applications in a cryo–vacuum and will run both horizontally and vertically. The combination of long range stepping motion and short range scanning offers nm positioning over the full range. The use of non–magnetic materials allows operation in high magnetic fields. It is equipped with high performance full ceramic linear roller guides for maximum stiffness and mechanical stability. The guides are spring preloaded, ensuring consistent performance with play free and smooth running from ambient to cryogenic temperatures.
|Type of motion||-||Linear, any orientation|
|Step/scan actuator *||-||Piezo ceramic|
|Speed @ ambient||mm/s||3||3|
|Speed @ 4K||mm/s||1||1|
|Min. step size @ ambient||nm||150||150|
|Min. step size @ 4K||nm||50||50|
|Scan Range @ ambient**||µm||10||10|
|Scan Range @ 4K **||µm||2||2|
|Scanner sensitivity @ ambient||nm/V||66||66|
|Scanner sensitivity @ 4K||nm/V||13||13|
|Driving force @ ambient||N||2||2|
|Driving force @ 4K||N||1||1|
|Payload for horizontal motion||grams||1000||500|
|Payload for vertical motion||grams||60||50|
|Mechanical endstops||-||at begin and end of range|
|Main construction material||-||Titanium, bronze, ceramic|
|* Step/scan positioning is both done with the CADM2, not simultaneously|
|** CADM2 -20 to +130V, 10 bits resolution, setpoint rate approx. 10Hz|
The RLS (Resistive Linear Sensor) is a resistive based sensor that can be added to selected positioners for position feedback. A wiper slides over a resistive track and the measured voltage is a measure of position. Resolution is determined by electrical noise and length of the resistive track. It is an absolute sensor, which means that it will give the actual position, even after recovering from a power shutdown. The RLS requires the RSM electronics module as voltage source and position readout. More info can be found in the Downloads section.
HV rated positioners can realistically be considered compatible with pressures as low as 1E-8 mbar. Lower pressures can be achieved by prolonged baking of positioners in vacuum at 100-150 deg C, depending on the type of positioner. Upon request JPE can provide such service at additional costs.
CBS5 /HV: Cryo Bearing Stage 5
CBS5-RLS /HV: CBS5 incl. Resistive Linear Sensor
I1-CBS5: Interface bracket for CBS5, to add z axis on x or y
I2-CBS5: Tabletop bracket for CBS5 in z-configuration
CBS10 /HV: Cryo Bearing Stage 10
CBS10-RLS /HV: CBS10 incl. Resistive Linear Sensor
I1-CBS10: Interface bracket for CBS10, to add z axis on x or xy