CBS – Cryo Bearing Stage

An all-round linear positioner, which can easily be combined to multiple axes
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Product description

The Cryo Bearing Stage (CBS) is a robust linear stage for all-round applications in a cryo-vacuum and will run both horizontally and vertically. The combination of long range stepping motion and short range scanning offers nanometer positioning over the full range. The use of non-magnetic materials allows operation in high magnetic fields. It is equipped with high performance full ceramic linear roller guides for maximum stiffness and mechanical stability. The guides are spring preloaded, ensuring consistent performance with playfree and smooth running from ambient to cryogenic temperatures.

  • Downloads
  • Specifications
  • Product options
  • Product configurations
  • Controller
  • Videos

Active axes-1
Type of motion-Linear, any orientation
Coarse/scanning actuator *-Piezo ceramic
Coarse Rangemm105,5
Speed @ ambientmm/s33
Speed @ 4Kmm/s11
Min. step size @ ambientnm150150
Min. step size @ 4Knm5050
Scan Range @ ambientµm88
Scan Range @ 4K µm 1.61,6
Scanner sensitivity @ ambient **nm/V6666
Scanner sensitivity @ 4K **nm/V1313
Driving force @ ambientN22
Driving force @ 4KN11
Payload for horizontal motionkg10,5
Payload for vertical motionkg0.060.05
Mechanical endstops-at begin and end of range
Operating temperatureK0.02-375
Main construction material-Titanium, bronze, ceramic
Controller/driver-CAB-230(115), CADM2
Sensor readout-N/ARSMN/ARSM
* Coarse/scan positioning is both done with the CADM2, not simultaneously
** CADM2 -20 to +130V, 10 bits resolution, setpoint rate approx. 10Hz

The RLS (Resistive Linear Sensor) is a resistive based sensor that can be added to selected positioners for position feedback. A wiper slides over a resistive track and the measured voltage is a measure of position. Resolution is determined by electrical noise and length of the resistive track. It is an absolute sensor, which means that it will give the actual position, even after recovering from a power shutdown. The RLS requires the RSM electronics module as voltage source and position readout. More info can be found in the Downloads section.


CBS5: Cryo Bearing Stage 5
CBS5-RLS: CBS5 incl. Resistive Linear Sensor
I1-CBS5:Interface bracket for CBS5, to add z axis on x or y
I2-CBS5: Tabletop bracket for CBS5 in z-configuration
CBS10: Cryo Bearing Stage 10
CBS10-RLS: CBS10 incl. Resistive Linear Sensor
I1-CBS10: Interface bracket for CBS10, to add z axis on x or xy



CBS Operational in Cryo

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