Cryo Positioning Stage – High Resonance (CPSHR)

A CRYOGENIC POSITIONING STAGE WITH NANOMETER ACCURACY AND STABILITY

  • Parallel kinematics, high stiffness design
  • High internal resonances, up to 4kHz
  • Coarse motion using Cryo Linear Actuators
  • Choice of 3 types with unique features
  • CPSHR1: compact, high resonances, titanium
  • CPSHR2: large stroke, lower resonances, higher thermal conductivity, phosphor bronze
  • CPSHR3: large stroke, high resonances, optimal thermal conductivity, aluminium
  • Scanner option “S”
  • Cryo Optical Encoder option “COE”

Product description

The Cryo Positioning Stage High Resonance (CPSHR) is a XYZ positioning stage developed for use in a cryo-vacuum environment. Parallel kinematics result in a light and stiff stage with very high internal resonance frequencies, making it less sensitive to floor vibrations (read our application note on Cavity Stability Measurements). The CPSHR1 is the most compact design with small stroke and high resonances. The CPSHR2 has large stroke and improved thermal conductivity but lower resonances. The CPSHR3 combines the best of both worlds with large stroke, further optimized thermal conductivity and high resonances.

Product options

– Scanner
– COE (Cryo optical encoder)

specsunitCPSHR1-SCPSHR2CPSHR2-SCPSHR2-COECPSHR2-S-COECPSHR3CPSHR3-SCPSHR3-COECPSHR3-S-COE
SYSTEM SPECIFICATIONS
Active axes3
Type of motionx, y, z with parasitic RxRy
System Range *mm^3approx. 1x1x1approx. 10x10x4approx. 8x8x4
System scan range @4Kµm^3approx. 1x1x0.5N/Aapprox. 10x10x1.6N/Aapprox. 10x10x1.6N/Aapprox. 8x8x1.6N/Aapprox. 8x8x1.6
Parasitic angle from xy strokemrad/mm201417
Coarse actuatorCLA2201CLA2601
Scanning actuatorPiezo ceramicN/APiezo ceramicN/APiezo ceramicN/APiezo ceramicN/APiezo ceramic
Endstops **at z -0.5mmat z -3mm and z +3mm
Main construction materialTitaniumPhosphor Bronze (improved thermal conductivity, lower resonances)Aluminium (optimal thermal conductivity, high resonances)
1st natural frequencykHzxy:1.5 / z:4,0xy: 1.2 / z: 2.2xy: 0.55 / z: 2.2xy: 1.2 / z: 2.2xy: 0.55 / z: 2.2xy: 2 / z: 3.7xy: 1.5 / z: 3.7xy: 2 / z: 3.7xy: 1.5 / z: 3.7
ACTUATOR SPECIFICATIONS
Specifications are given for individual actuators unless otherwise mentioned. See interface drawing for transformation matrix from actuator outputs to system motion
Coarse rangemm± 0.5± 3
Scan range @ 293 Kµm2.5N/A8N/A8N/A8N/A8
Scan range @ 4 Kµm0.5N/A1.6N/A1.6N/A1.6N/A1.6
Coarse step size @ 293 Knm5-25
Coarse step size @ 4 Knm1-5
Scanner sensitivity @ 293 Knm/V25N/A66N/A66N/A66N/A66
Scanner sensitivity @ 4 Knm/V5N/A13N/A13N/A13N/A13
Load capacitygrams100200
Operating temperatureK0.8-3750.02-3751.5-375
Massgrams300 12301450510570
Coarse actuator spindle pitchmm/turn0.25
Coarse actuator encoder resolution ***PPRN/AN/A850N/A850
DRIVE ELECTRONICS
Controller/driverCAB-230(115), CADM(2), MCM
Encoder readoutN/AN/AOEM2N/AOEM2
Scanner module PSM, PSMILN/APSM, PSMILN/APSM, PSMILN/APSM, PSMILN/APSM, PSMIL
* Typical volume for positioning. Due to the parallel kinematics the indicated max values are not necessarily simultaneously achievable. On the other hand max values can be bigger when strokes along other axes are limited.
** Endstops are placed close to, but not coincident with each actuator motion axis. Together they define a system z-position, with x and y being 0. Touching multiple endstops in an uncontrolled manner with x and y not being 0 can cause the system to jam and could require manual action to free it.
*** Linear resolution can be found by dividing the spindle pitch by PPR (pulses per revolution)

CPSHR1-S: CPSHR1 incl. Scanner
CPSHR2: CPSHR2
CPSHR2-S: CPSHR2 incl. Scanner
CPSHR2-COE: CPSHR2 incl. Cryo Optical Encoder
CPSHR2-S-COE: CPSHR2 incl. Scanner and Cryo Optical Encoder
CPSHR3: CPSHR3
CPSHR3-S: CPSHR3 incl. Scanner
CPSHR3-COE: CPSHR3 incl. Cryo Optical Encoder
CPSHR3-S-COE: CPSHR3 incl. Scanner and Cryo Optical Encoder

How It Works

27 Point Scan Pattern Using Position Control

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