- UHV compatible (completely sealed)
- Contamination free (no particle generation)
- Welded stainless steel construction
- Suited for harsh environments (dust)
- Nanometer resolution
- Absolute positioning
- Push-pull load capacity, large stroke: 10 mm
- Self-locking (set-and-forget)
- Compatible with industrial motion systems
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Product description
The Nano Stepper Actuator (NSAU) is a completely sealed linear actuator developed for highly accurate positioning in Ultra High Vacuum (UHV) or UItra Clean Environments. A stepper motor combined with a high quality reduction and ball screw offers backlash free nanometer resolution and high load capacity. Electrical limit switches and motor temperature sensing are standard integrated and the absolute encoder offers the user high resolution position feedback and absolute position information, even after a power-off.
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| specs | unit | NSAU-010A |
|---|---|---|
| ACTUATOR SPECIFICATIONS | ||
| Active axes | - | 1 |
| Type of motion | - | x |
| Range | mm | 10 |
| Max. velocity | mm/s | 0.1 |
| Step resolution nominal | nm | 50 (full step) |
| Step resolution best | nm | 2.5 (20x micro stepping) |
| Repeatability | - | 2 x step resolution |
| Accuracy full stroke | µm | 6 (IT5) |
| Backlash | m | none |
| Axial load capacity | N | ± 300 |
| Radial load capacity | N | 5% of actual axial load |
| Axial stiffness | N/m | 2e7 |
| Mass | kg | 1.0 |
| Vacuum compatibility | - | UHV |
| Bake-out temperature | °C | <80 |
| Stepper motor | - | 2 phase, bipolar |
| Max current / phase | A | <0.8 |
| Resistance / phase | Ω | 5.4 |
| Inductance / phase | mH | 1.5 |
| Limit switches | - | Normally open, switch to GND |
| Thermal sensor | - | Pt1000, keep below 80 ° C |
| Encoder voltage | VDC | 4.75-5.5 |
| Encoder current, typical | A | 0.08 |
| Encoder resolution * | 12 bit ST 12 bit MT 2,44nm/count |
|
| Encoder interface | SSI, RS485/RS422 compatible | |
| DRIVE ELECTRONICS | ||
| Controller | - | CAB-230(115), NCM1 |
| * ST is SingleTurn resolution, counts per revolution MT is MultiTurn resolution, the number of countable revolutions |
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NSAU-010A /UHV: Nano Stepping Actuator UHV-Absolute Encoder
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