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The Nano Stepper Actuator (NSAU) is a completely sealed linear actuator developed for highly accurate positioning in Ultra High Vacuum (UHV) or UItra Clean Environments. A stepper motor combined with a high quality reduction and ball screw offers backlash free nanometer resolution and high load capacity. Electrical limit switches and motor temperature sensing are standard integrated and the absolute encoder offers the user high resolution position feedback and absolute position information, even after a power-off.
|Type of motion||-||x|
|Step resolution nominal||nm||50 (full step)|
|Step resolution best||nm||2.5 (20x micro stepping)|
|Repeatability||-||2 x step resolution|
|Accuracy full stroke||µm||6 (IT5)|
|Axial load capacity||N||± 300|
|Radial load capacity||N||5% of actual axial load|
|Stepper motor||-||2 phase, bipolar|
|Max current / phase||A||<0.8|
|Resistance / phase||Ω||5.4|
|Inductance / phase||mH||1.5|
|Limit switches||-||Normally open, switch to GND|
|Thermal sensor||-||Pt1000, keep below 80 ° C|
|Encoder current, typical||A||0.08|
|Encoder resolution *||12 bit ST
12 bit MT
|Encoder interface||SSI, RS485/RS422 compatible|
|* ST is SingleTurn resolution, counts per revolution
MT is MultiTurn resolution, the number of countable revolutions
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NSAU-010A /UHV: Nano Stepping Actuator UHV-Absolute Encoder
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