PRODUCTION MACHINE DESIGN: PARTICLE FREE SPRAY COATER

PROJECT PHOTOS

PROJECT FEATURES

Specification
System architecture
Concept design
Contamination control
Stage trajectory control
Machine safety
Realization & integration

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DESCRIPTION

Deposition of thin (sub micron) layers by spraying is very sensitive to particles in the environment. JPE realized a solution in which the moving positioning stage has been isolated from the process chamber. This project has been realized in 6 months’ time from initial problem description to the delivery of an integrated system.