The Cryo Hexapod Positioning System (CHPS) is a 6 DoF positioning stage developed for use in a cryo-vacuum environment. Parallel kinematics result in a light and stiff stage with high internal resonance frequencies. This makes the sample table position insensitive to ground vibrations. Coarse and fine actuation in series gives the CHPS millimeter range, (sub-)nm resolution, high stability and dynamic positioning performance. Symmetry makes the table position highly insensitive to thermal fluctuations. Each leg is fitted with an optical encoder for controlled motion.
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