- Electromagnetic force actuator
- Contactless: no friction or wear
- Push-pull capacity
- Compact and robust design
- 5K to 375K operational range
- Fast dynamic operation
- UHV compatible (completely sealed by welding)
- Electrical connection via standard 1mm contacts
- Compatible with industrial motion controllers
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Product description
The Cryo Voice Coil Actuator (CVCA) is an electromagnetic linear force actuator for cryogenic operation. The all-welded titanium construction with integrated power feedthrough pins hermetically encapsulates the coil making it also UHV compatible. The contactless nature of a voice coil actuator makes it especially suited for applications requiring smooth accurate positioning over the full stroke or for high lifetime applications like wafer probing.
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| specs | unit | symbol | CVCA1 | |||
|---|---|---|---|---|---|---|
| SYSTEM SPECIFICATIONS 1 | ||||||
| Active axes | - | - | 1 | |||
| Type of motion | - | - | Linear | |||
| Actuator | - | - | Electromagnetic | |||
| Stroke | mm | s | 6 (-2,5 to +3.5) | |||
| Operating temperature | K | Tenv | ≈5 - 375 (lower limit set by superconductivity of titanium) | |||
| Main construction material | - | - | Titanium, nickel plated magnetically soft steel | |||
| Mass coil assembly (stator) | grams | mstator | 41 | |||
| Mass magnet assembly (mover) | grams | mmover | 48 | |||
| Radial clearance | mm | - | 0,35, both directions | |||
| Max. allowable coil temperature | °C | Tcoil_max | 140 (180 wire specification) | |||
| Benchmark coil temperatures 2 | - | - | 10K | 50K | 77K | 300K (air) |
| Coil resistance | Ohm | R | 0.0043 | 0.18 | 0.43 | 3.58 |
| Voltage at peak force | V | VFp | 0.009 | 0.35 | 0.81 | 7.06 |
| Current at peak forc e | A | IFp | 2.08 | 1.92 | 1.88 | 1.5 |
| Back EMF constant | V/m/s | kBEMF | 3.83 | 4.17 | 4.26 | 4 |
| Coil inductance | mH | L | 0,62 @ 100Hz | |||
| Force sensitivity | N/A | kf | 3.83 | 4.17 | 4.26 | 4 |
| Actuator constant | N/√W | ka | 58.2 | 9.81 | 6.43 | 2.07 |
| Max continuous force 3 | N | Fss | 8 | 5 | 4.5 | 3 |
| Peak force 4 | N | Fp | >8 | >8 | 8 | 6 |
| Power at peak force | W | Pp | 0.019 | 0.67 | 1.55 | 8.4 |
| Power at max. continuous force | W | Pss | 0.019 | 0.26 | 0.49 | 2.1 |
| Power at 1N continuous force | W | - | 0.0003 | 0.01 | 0.024 | 0.23 |
| Electrical time constant 5 | ms | τE | 144 | 3.44 | 1,44 | 0,17 |
| Mechanical time constant 6 | ms | τM | 0.014 | 0.5 | 1.14 | 10,7 |
| Thermal resistance of coil assembly 7 | K/W | Rstator | 789 | 139 | 11 | 2.2 |
| Thermal resistance of magnet assembly 7 | K/W | Rmover | 1.22 | 1.22 | 1.22 | 1.22 |
| DRIVE ELECTRONICS | ||||||
| Controller/driver | - | - | Current amplifier | |||
| 1 At zero position. 2 Actual initial coil temperature at 10K tests was approx. 50K because of thermal resistances, 10K values from analysis. 3 At 100K coil temperature rise. | ||||||
| 4 Allowed for 10 seconds. Values ≤50K limited by used current amplifier. 5 L/R. 6 (mmover*R )/(kf*kBEMF). | ||||||
| 7 Theoretical from FEA. Coil assembly is based on radiation between windings and conduction through bobbin. | ||||||
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CVCA1: Cryo Voice coil actuator 1
Compatible with industrial motion controllers.
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